Performance of the SRRC scanning photoelectron microscope

被引：50

作者：

Hong, IH ^{[1
]}

Lee, TH

Yin, GC

Wei, DH

Juang, JM

Dann, TE

Klauser, R

Chuang, TJ

Chen, CT

Tsang, KL

机构：

[1] Synchrotron Radiat Res Ctr, Hsinchu 30077, Taiwan

[2] Acad Sinica, Inst Atom & Mol Sci, Taipei 10764, Taiwan

[3] Natl Taiwan Univ, Ctr Condensed Matter Sci, Taipei 106, Taiwan

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 2001年 / 467卷

关键词：

scanning photoelectron microscope spectromicroscope; zone plated; image;

D O I：

10.1016/S0168-9002(01)00516-2

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A scanning photoelectron microscope has been constructed at SRRC. This SPEM system consists primarily of a Fresnel zone plate (ZP) with an order-selection aperture, a flexure scanning stage, a hemispherical electron analyzer. and sample/ZP insertion system. The flexure stage is used to scan the sample. A hemispherical analyzer with Omni V lens and a 16-channel multichannel detector (MCD) is used to collect photoelectrons. A set of 16 photoelectron images at different kinetic energies can be simultaneously acquired in one single scan. The data acquisition system is designed to collect up to 32 images concurrently. including 16 MCD signals, total electron yield and transmitted photon flux. The design and some initial test results of this SPEM station are presented and discussed. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：905 / 908

页数：4

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