Low dark current GaN schottky UV photodiodes using oxidised IrNi schottky contact

被引:7
作者
Jiang, H [1 ]
Egawa, T
Ishikawa, H
Dou, YB
Shao, CL
Jimbo, T
机构
[1] Nagoya Inst Technol, Res Ctr Nanodevices & Syst, Showa Ku, Nagoya, Aichi 4668555, Japan
[2] Nagoya Inst Technol, Dept Environm Technol & Urban Planning, Showa Ku, Nagoya, Aichi 4668555, Japan
关键词
D O I
10.1049/el:20031039
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Ir/Ni/Ir metallisation was employed as Schottky contacts of GaN Schottky photodiodes. After annealing at 500degreesC in O-2 for 1 min, the Schottky contact achieved the maximum barrier height of 1.28 eV and the minimum dark current densities of 1.8 x 10(-10) A/cm(2) at -5 V bias. The peak responsivity is 105 mA/W at zero bias and increases to 150mA/W at -15V bias. The detectivity was estimated as 5.8 x 10(15) cmHz(1/2) W-1 at zero bias.
引用
收藏
页码:1604 / 1606
页数:3
相关论文
共 5 条
[1]   High-speed visible-blind GaN-based indium-tin-oxide Schottky photodiodes [J].
Biyikli, N ;
Kartaloglu, T ;
Aytur, O ;
Kimukin, I ;
Ozbay, E .
APPLIED PHYSICS LETTERS, 2001, 79 (17) :2838-2840
[2]   SCHOTTKY DIODES WITH HIGH SERIES RESISTANCE - A SIMPLE METHOD OF DETERMINING THE BARRIER HEIGHTS [J].
BRUTSCHER, N ;
HOHEISEL, M .
SOLID-STATE ELECTRONICS, 1988, 31 (01) :87-89
[3]   Schottky barrier detectors on GaN for visible-blind ultraviolet detection [J].
Chen, Q ;
Yang, JW ;
Osinsky, A ;
Gangopadhyay, S ;
Lim, B ;
Anwar, MZ ;
Khan, MA ;
Kuksenkov, D ;
Temkin, H .
APPLIED PHYSICS LETTERS, 1997, 70 (17) :2277-2279
[4]   Selective regrowth of Al0.30Ga0.70N p-i-n photodiodes [J].
Collins, CJ ;
Li, T ;
Lambert, DJH ;
Wong, MM ;
Dupuis, RD ;
Campbell, JC .
APPLIED PHYSICS LETTERS, 2000, 77 (18) :2810-2812
[5]   Transparent ohmic contacts of oxidized Ru and Ir on p-type GaN [J].
Jang, HW ;
Lee, JL .
JOURNAL OF APPLIED PHYSICS, 2003, 93 (09) :5416-5421