Spectroscopic ellipsometry of few-layer graphene

被引:31
作者
Isic, Goran [1 ,2 ]
Jakovljevic, Milka [1 ]
Filipovic, Marko [1 ]
Jovanovic, Djordje [1 ]
Vasic, Borislav [1 ]
Lazovic, Sasa [1 ]
Puac, Nevena [1 ]
Petrovic, Zoran Lj. [1 ]
Kostic, Radmila [1 ]
Gajic, Rados [1 ]
Humlicek, Jozef [3 ]
Losurdo, Maria [4 ]
Bruno, Giovanni [4 ]
Bergmair, Iris [5 ]
Hingerl, Kurt [6 ]
机构
[1] Univ Belgrade, Inst Phys, Belgrade 11080, Serbia
[2] Univ Leeds, Sch Elect & Elect Engn, Leeds LS2 9JT, W Yorkshire, England
[3] Masaryk Univ, Dept Condensed Matter Phys, Fac Sci, CZ-61137 Brno, Czech Republic
[4] Univ Bari, Inst Inorgan Methodol & Plasmas, IMIP CNR, Dept Chem, I-70126 Bari, Italy
[5] Profactor GmbH, Funct Surfaces & Nanostruct, A-4407 Steyr Gleink, Austria
[6] Johannes Kepler Univ Linz, Ctr Surface & Nanoanalyt, A-4040 Linz, Austria
关键词
graphene; ellipsometry; island film model; CRYSTALS;
D O I
10.1117/1.3598162
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The optical properties of few-layer graphene (FLG) films were measured in the ultraviolet and visible spectrum using a spectroscopic ellipsometer equipped with a 50-mu m nominal microspot size. The FLG thickness was found by atomic force microscopy. Measurements revealed that the microspot is larger than the FLG flake. The ellipsometric data was interpreted using the island-film model. Comparison with graphite and recently published graphene data showed reasonable agreement, but with some features that could not be explained. The error margin for the optical constants was estimated to be +/- 10%. (C) 2011 Society of Photo-Optical Instrumentation Engineers (SPIE). [DOI: 10.1117/1.3598162]
引用
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页数:7
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