UV nanoimprint lithography for the realization of large-area ordered SiGe/Si(001) island arrays

被引：30

作者：

Lausecker, E. ^{[1
]}

Brehm, M. ^{[1
]}

Grydlik, M. ^{[1
]}

Hackl, F. ^{[1
]}

Bergmair, I. ^{[2
]}

Muehlberger, M. ^{[2
]}

Fromherz, T. ^{[1
]}

Schaeffler, F. ^{[1
]}

Bauer, G. ^{[1
]}

机构：

[1] Johannes Kepler Univ Linz, Inst Semicond & Solid State Phys, A-4040 Linz, Austria

[2] Profactor GmbH, Funct Surfaces & Nanostruct, A-4407 Steyr Gleink, Austria

来源：

APPLIED PHYSICS LETTERS | 2011年 / 98卷 / 14期

关键词：

ASSEMBLED GE ISLANDS; QUANTUM-WELLS; DOTS; SI; PHOTOLUMINESCENCE; NANOSTRUCTURES; ALIGNMENT; SI(001); GROWTH;

D O I：

10.1063/1.3575554

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We use UV nanoimprint lithography for the pit-patterning of silicon substrates. Ordered silicon-germanium islands are grown inside these pits by molecular-beam epitaxy on arrays of 3 x 3 mm(2) and characterized by atomic force microscopy (AFM) and photoluminescence (PL) measurements. AFM-based statistics reveals an extremely uniform size distribution of the islands in the patterned areas. These results are confirmed by very narrow and uniform PL peaks recorded at various positions across the patterned arrays. (C) 2011 American Institute of Physics. [doi:10.1063/1.3575554]

引用

页数：3

共 20 条

[11] Fabrication and Photoluminescence Study of Large-Area Ordered and Size-Controlled GeSi Multi-quantum-well Nanopillar Arrays [J].

Yuwen Jiang ;

Shufan Huang ;

Zhichao Zhu ;

Cheng Zeng ;

Yongliang Fan ;

Zuimin Jiang .

Nanoscale Research Letters, 2016, 11

[12] In situ synthesis of large-area single sub-10 nm nanoparticle arrays by polymer pen lithography [J].

Wu, Jin ;

Zan, Xiaoli ;

Li, Shaozhou ;

Liu, Yayuan ;

Cui, Chenlong ;

Zou, Binghua ;

Zhang, Weina ;

Xu, Hongbo ;

Duan, Hongwei ;

Tian, Danbi ;

Huang, Wei ;

Huo, Fengwei .

NANOSCALE, 2014, 6 (02) :749-752

[13] Fabrication of large-area, high-density Ni nanopillar arrays on GaAs substrates using diblock copolymer lithography and electrodeposition [J].

Chang, Chun-Chieh ;

Botez, Dan ;

Wan, Lei ;

Nealey, Paul F. ;

Ruder, Steven ;

Kuech, Thomas F. .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2013, 31 (03)

[14] A High-Speed Image Sensor Based on Large-Area MoTe2/Si Photodiode Arrays [J].

Wang, Die ;

Wang, Xinyu ;

Pan, Yu ;

Bian, Jihong ;

Liu, Kang ;

Guo, Jing ;

Lin, Jiamu ;

Sun, Zibo ;

Gou, Saifei ;

Sheng, Chuming ;

Dong, Xiangqi ;

Su, Hesheng ;

Zhu, Yuxuan ;

Sun, Qicheng ;

Xu, Zihan ;

Guo, Aiying ;

Shao, Lei ;

Chen, Honglei ;

Bao, Wenzhong .

ADVANCED OPTICAL MATERIALS, 2024, 12 (22)

[15] High-Resolution Patterning of Various Large-Area, Highly Ordered Structural Motifs by Directional Photofluidization Lithography: Sub-30-nm Line, Ellipsoid, Rectangle, and Circle Arrays [J].

Lee, Seungwoo ;

Kang, Hong Suk ;

Park, Jung-Ki .

ADVANCED FUNCTIONAL MATERIALS, 2011, 21 (10) :1770-1778

[16] Self-Aligned Plasmonic Lithography for Maskless Fabrication of Large-Area Long-Range Ordered 2D Nanostructures [J].

Huang, Jiaxu ;

Xu, Kang ;

Hu, Jin ;

Yuan, Dandan ;

Li, Jun ;

Qiao, Jingyu ;

Xu, Shaolin .

NANO LETTERS, 2022, 22 (15) :6223-6228

[17] The selective fabrication of large-area highly ordered TiO2 nanorod and nanotube arrays on conductive transparent substrates via sol-gel electrophoresis [J].

Ren, X. ;

Gershon, T. ;

Iza, D. C. ;

Munoz-Rojas, D. ;

Musselman, K. ;

MacManus-Driscoll, J. L. .

NANOTECHNOLOGY, 2009, 20 (36)

[18] Fabrication of large-area ordered array of gold nanoparticles on c-Si substrate and its characterisation through reflectance spectra [J].

Meena, Karishma ;

Kumar, Hanish ;

Goswami, Arjyajyoti ;

Aravindan, Sivanandam ;

Rao, Paruchuri Venkateshwara .

MICRO & NANO LETTERS, 2016, 11 (12) :819-821

[19] Self-assembly of Au nanocrystals into large-area 3-D ordered flexible superlattice nanostructures arrays for ultrasensitive trace multi-hazard detection [J].

Liu, Wei ;

Li, Qian ;

Wu, Jiabin ;

Wang, Weizhe ;

Jiang, Rui ;

Zhou, Chunli ;

Wang, Shuangbao ;

Zhang, Xueming ;

Sun, Tangyou ;

Xu, Zhimou ;

Wang, Dingsheng .

JOURNAL OF HAZARDOUS MATERIALS, 2023, 443

[20] Development of Large-Area CdTe/n+ -Si Epitaxial Layer-Based Heterojunction Diode-Type Gamma-Ray Detector Arrays [J].

Niraula, M. ;

Yasuda, K. ;

Kojima, M. ;

Kitagawa, S. ;

Tsubota, S. ;

Yamaguchi, T. ;

Ozawa, J. ;

Agata, Y. .

IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 2018, 65 (04) :1066-1069

← 1 2 →