Noncontact method for measuring coefficient of linear thermal expansion of thin films

被引：10

作者：

Rafla-Yuan, H ^{[1
]}

Hichwa, BP ^{[1
]}

Allen, TH ^{[1
]}

机构：

[1] Opt Coating Lab Inc, Santa Rosa, CA 95407 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1998年 / 16卷 / 05期

关键词：

D O I：

10.1116/1.581468

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We measured the coefficient of linear thermal expansion of ZnSe thin films with a temperature regulated spectroscopic ellipsometer. The change in the film thickness was found to be a quadratic function of temperature whereas the coefficient of linear thermal expansion varied linearly in the temperature range between 295 and 413 K. Tt While spectroscopic ellipsometry is recognized as a measurement technique to determine thin film optical constants and him thickness, the present work expands upon this technique to measure temperature induced dimensional change in the Angstrom range. (C) 1998 American Vacuum Society. [S0734-2101 (98)02605-0].

引用

页码：3119 / 3122

页数：4