Optimal FOM designed piezoelectric microgenerator with energy harvesting in a wide vibration bandwidth

This paper presents a novel micromechanined piezoelectric generator harvesting mechanical energy in a wide vibration bandwidth. Based on optimal Figure of Merit (FOM) and our developed scheme, the size of 3mm x 3mm x 5mm generator is composed of four connected-in-parallel cantilever structures, which are fabricated by an innovative process with the advantages of flexible membrane and minimized residual stress to achieve a large displacement. The designed generator is targeted at producing the power of microwatt to milliwatt in a reasonable wide mechanical vibration range (e.g. 300-800 Hz).