Tribological investigation of multilayer CrN/CrCN/TaN films deposited by close field unbalanced magnettron sputtering

被引：11
作者：
Bahce, Erkan [1 ]
Cakir, Nese [1 ]
机构：
[1] Inonu Univ, Fac Engn, Malatya, Turkey
来源：
REVIEWS ON ADVANCED MATERIALS SCIENCE | 2019年 / 58卷 / 01期
关键词：
Biomaterial; CoCrMo alloy; PVD coating; Tribology; Tantalum Nitride; MECHANICAL-PROPERTIES; COCRMO ALLOY; COATINGS; MICROSTRUCTURE; BEHAVIOR; CORROSION;
D O I：
10.1515/rams-2019-0036
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
CrN/CrCN/TaN multilayer films were deposited onto the CoCrMo alloy substrates at different number layers as two, four and 8 layers by close-field unbalanced magnetron sputtering method. Microstructure and the tribological properties of the films were characterized by XRD, SEM, pin-on-disk wear test, scratch test, micro hardness. CrN/CrCN/TaN multilayer coatings exhibited good adhesion properties on the CoCrMo alloy substrate. A very high hardness value of 60 GPa was obtained for 8 multilayered coating. As a result of the pin-on-disc wear tests, it was found that the tribological properties of the CoCrMo alloy were enhanced by coating its surface with this architecture by using close-field unbalanced magnetron system with used parameters.
引用
收藏
页码：271 / 279
页数：9
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