SURFACE MICROSCOPY WITH LASERLESS MEMS BASED AFM PROBES

被引：14

作者：

Algre, E. ^{[1
]}

Legrand, B. ^{[1
]}

Faucher, M. ^{[1
]}

Walter, B. ^{[1
]}

Buchaillot, L. ^{[1
]}

机构：

[1] Univ Lille 1, Ctr Hyperfrequences & Semicond, CNRS, IEMN,UMR 8520, F-59655 Villeneuve Dascq, France

来源：

MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2010年

关键词：

DISK RESONATORS;

D O I：

10.1109/MEMSYS.2010.5442509

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report here on results of AFM microscopy using laserless MEMS based probes. This new concept of Atomic Force Microscope (AFM) probes using bulk-mode silicon resonators was previously presented [1]. They consist on silicon ring resonators with capacitive transducers and integrated sensing nanotip. We have also demonstrated that these probes are sensitive to nanoscale tip-surface interactions [2], paving the way for AFM imaging. We describe here probes fabrication and their implementation on a Veeco commercial AFM microscope. Force curve measurements are realized in order to set the experimental conditions for AFM operation. For the first time, AFM microscopy images using these laserless MEMS based AFM probes are presented.

引用

页码：292 / 295

页数：4

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[2]

Algre E., 2009, 15th International Conference on Solid-State Sensors, Actuators and Microsystems. Transducers 2009, P1638, DOI 10.1109/SENSOR.2009.5285774

[3] Mechanically corner-coupled square microresonator array for reduced series motional resistance [J].