A compact time-of-flight mass spectrometer for ion source characterization

被引：3

作者：

Chen, L. ^{[1
]}

Wan, X. ^{[1
]}

Jin, D. Z. ^{[1
]}

Tan, X. H. ^{[1
]}

Huang, Z. X. ^{[2
]}

Tan, G. B. ^{[3
]}

机构：

[1] China Acad Engn Phys, Inst Elect Engn, Mianyang 621900, Sichuan, Peoples R China

[2] Jinan Univ, Inst Atmosphere Environm Secur & Pollut Control, Guangzhou 510632, Guangdong, Peoples R China

[3] Shanghai Univ, Inst Environm Pollut & Hlth, Sch Environm & Chem Engn, Shanghai 200444, Peoples R China

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2015年 / 86卷 / 03期

关键词：

Impact ionization - Mass spectrometers;

D O I：

10.1063/1.4914588

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A compact time-of-flight mass spectrometer with overall dimension of about 413 x 250 x 414 mm based on orthogonal injection and angle reflection has been developed for ion source characterization. Configuration and principle of the time-of-flight mass spectrometer are introduced in this paper. The mass resolution is optimized to be about 1690 (FWHM), and the ion energy detection range is tested to be between about 3 and 163 eV with the help of electron impact ion source. High mass resolution and compact configuration make this spectrometer useful to provide a valuable diagnostic for ion spectra fundamental research and study the mass to charge composition of plasma with wide range of parameters. (C) 2015 AIP Publishing LLC.

引用

页数：3