A compact time-of-flight mass spectrometer for ion source characterization

被引：3
|
作者：
Chen, L. [1 ]
Wan, X. [1 ]
Jin, D. Z. [1 ]
Tan, X. H. [1 ]
Huang, Z. X. [2 ]
Tan, G. B. [3 ]
机构：
[1] China Acad Engn Phys, Inst Elect Engn, Mianyang 621900, Sichuan, Peoples R China
[2] Jinan Univ, Inst Atmosphere Environm Secur & Pollut Control, Guangzhou 510632, Guangdong, Peoples R China
[3] Shanghai Univ, Inst Environm Pollut & Hlth, Sch Environm & Chem Engn, Shanghai 200444, Peoples R China
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 2015年 / 86卷 / 03期
关键词：
Impact ionization - Mass spectrometers;
D O I：
10.1063/1.4914588
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A compact time-of-flight mass spectrometer with overall dimension of about 413 x 250 x 414 mm based on orthogonal injection and angle reflection has been developed for ion source characterization. Configuration and principle of the time-of-flight mass spectrometer are introduced in this paper. The mass resolution is optimized to be about 1690 (FWHM), and the ion energy detection range is tested to be between about 3 and 163 eV with the help of electron impact ion source. High mass resolution and compact configuration make this spectrometer useful to provide a valuable diagnostic for ion spectra fundamental research and study the mass to charge composition of plasma with wide range of parameters. (C) 2015 AIP Publishing LLC.
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收藏
页数：3
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