A fuzzy control model for a Helicon Plasma Source

被引：0

作者：

Zhang, S ^{[1
]}

Cheetham, AD ^{[1
]}

Lund, T ^{[1
]}

Rayner, JP ^{[1
]}

机构：

[1] Univ Canberra, Plasma Instrumentat Lab, Canberra, ACT 2601, Australia

来源：

ADVANCES IN INTELLIGENT SYSTEMS: THEORY AND APPLICATIONS | 2000年 / 59卷

关键词：

D O I：

暂无

中图分类号：

TP18 [人工智能理论];

学科分类号：

081104 ; 0812 ; 0835 ; 1405 ;

摘要：

This paper describes a rule-based fuzzy control model for a Helicon Plasma Source. The purpose of this model is to build a distributed fuzzy control system which starts up the plasma source and establishes and maintains a required plasma number density in the reactor vessel with a nominated mode of operation. To cope with the complexities of the system a hierarchy of three fuzzy interference engines is proposed. Simulations and experiments are in progress to verify and refine the proposed method.

引用

页码：53 / 59

页数：7

共 6 条

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[2]

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[3]

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[5]

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Zhang, ZB ;

Rayner, JP ;

Cheetham, AD ;

Lund, T .

IEEE TRANSACTIONS ON PLASMA SCIENCE, 1998, 26 (01) :104-112

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