Pulsed digital oscillators as a tool for the selective activation of MEMS resonant modes

被引：1
作者：
Dominguez-Pumar, Manuel [1 ]
Blokhina, Elena [2 ]
Pons-Nin, Joan [1 ]
Feely, Orla [2 ]
Sanchez-Rojas, Jose Luis [3 ]
机构：
[1] Univ Politecn Cataluna, Barcelona, Spain
[2] Univ Coll Dublin, Dublin, Ireland
[3] Univ Castilla La Mancha, Ciudad Real, Spain
来源：
MICRO- AND NANOTECHNOLOGY SENSORS, SYSTEMS, AND APPLICATIONS II | 2010年 / 7679卷
基金：
爱尔兰科学基金会;
关键词：
MEMS; resonant modes; oscillators;
D O I：
10.1117/12.853069/MTO
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The purpose of this work is to show that it is possible to excite selectively different resonant modes of a MEMS resonator, by simply changing some parameters in the feedback filter of Pulsed Digital Oscillators (PDOs). Extensive simulation and experimental results are presented showing the goodness of the proposed approach. An iterative map, contemplating more than one resonance, is also obtained from the equation governing the motion of a cantilever.
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页数：11
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