Study of optical properties of MoxC1-x films

被引：20

作者：

De Temmerman, G ^{[1
]}

Ley, M ^{[1
]}

Boudaden, J ^{[1
]}

Oelhafen, P ^{[1
]}

机构：

[1] Univ Basel, Inst Phys, CH-4056 Basel, Switzerland

来源：

JOURNAL OF NUCLEAR MATERIALS | 2005年 / 337卷 / 1-3期

关键词：

molybdenum; carbide; reflectivity; X-ray photoelectron spectroscopy;

D O I：

10.1016/j.jnucmat.2004.10.037

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Metallic optical mirrors are foreseen to be exploited in plasma diagnostic systems in ITER. They will suffer from deposition of impurities like carbon causing marked changes of the reflectivity. In this paper, we have focused on the co-deposition of MoxC1-x films (0 <= x <= 0.61) and have studied the influence of the deposited thin film composition on the optical properties. Deposits were performed by magnetron co-sputtering with argon as process gas in a high vacuum system. In-situ XPS measurements, real time reflectometry, ex-situ spectrophotometry and spectroscopic ellipsometry were used to characterize the resulting layers. Carbide formation was evidenced. As expected, optical constants of the films and reflectivity were found to depend strongly on the film composition. Simulations of the impact of thin film composition on the reflectivity of a molybdenum mirror show how a thin deposited layer can drastically degrade the reflectivity. (c) 2004 Elsevier B.V. All rights reserved.

引用

页码：956 / 959

页数：4

共 17 条

[1]

Edwards D.F., 1985, Handbook of optical constants of solids

[2] Study on the structure and formation mechanism of molybdenum carbides [J].