Quadrature wavelength scanning interferometry

被引：3
|
作者：
Moschetti, Giuseppe [1 ,2 ]
Forbes, Alistair [1 ]
Leach, Richard K. [3 ]
Jiang, Xiang [2 ]
O'Connor, Daniel [1 ]
机构：
[1] Natl Phys Lab, Hampton Rd, Teddington TW11 0LW, Middx, England
[2] Univ Huddersfield, Ctr Precis Technol, Huddersfield HD1 3DH, W Yorkshire, England
[3] Univ Nottingham, Mfg Metrol Team, Nottingham NG7 2RD, England
来源：
APPLIED OPTICS | 2016年 / 55卷 / 20期
基金：
英国工程与自然科学研究理事会; 欧洲研究理事会;
关键词：
FRINGE-ORDER DETERMINATION; WHITE-LIGHT INTERFEROMETRY; INTERFERENCE MICROSCOPY; PHASE; COMPENSATION; LASER;
D O I：
10.1364/AO.55.005332
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A novel method to double the measurement range of wavelength scanning interferometery (WSI) is described. In WSI the measured optical path difference (OPD) is affected by a sign ambiguity, that is, from an interference signal it is not possible to distinguish whether the OPD is positive or negative. The sign ambiguity can be resolved by measuring an interference signal in quadrature. A method to obtain a quadrature interference signal for WSI is described, and a theoretical analysis of the advantages is reported. Simulations of the advantages of the technique and of signal errors due to nonideal quadrature are discussed. The analysis and simulation are supported by experimental measurements to show the improved performances.
引用
收藏
页码：5332 / 5340
页数：9
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