Low loss Chalcogenide glass waveguides by thermal nano-imprint lithography

被引：69

作者：

Han, Ting ^{[1
]}

Madden, Steve ^{[1
]}

Bulla, Douglas ^{[1
]}

Luther-Davies, Barry ^{[1
]}

机构：

[1] Australian Natl Univ, Res Sch Phys & Engn, Ctr Ultrahigh Bandwidth Devices Opt Syst, Laser Phys Ctr, Canberra, ACT 2600, Australia

来源：

OPTICS EXPRESS | 2010年 / 18卷 / 18期

基金：

澳大利亚研究理事会;

关键词：

NANOIMPRINT; OPTICS; SPEED; FILMS;

D O I：

10.1364/OE.18.019286

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We report the fabrication of low loss rib waveguides from chalcogenide glass films by thermal nano-imprint using a soft stamp. Waveguides 2 - 4 mu m wide and 1 mu m high were fabricated with extremely smooth sidewalls and optical losses limited by Rayleigh scattering to values of 0.26 dB/cm for the TM and 0.27 dB/cm for TE polarizations at 1550nm. (C) 2010 Optical Society of America

引用

收藏

页码：19286 / 19291

页数：6

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