Eigenfrequency shift of micro-sensor with the concentrated mass and spring

被引:3
作者
Liu, Yun [1 ]
Zhang, Yin [2 ]
机构
[1] Kunming Univ Sci & Technol, Fac Informat & Automat, Kunming 650051, Yunnan Province, Peoples R China
[2] Chinese Acad Sci, Inst Mach, State Key Lab Nonlinear Mech LNM, Beijing 100080, Peoples R China
来源
2007 IEEE INTERNATIONAL CONFERENCE ON MECHATRONICS AND AUTOMATION, VOLS I-V, CONFERENCE PROCEEDINGS | 2007年
基金
中国国家自然科学基金;
关键词
eigenfrequency; beam; concentrated mass/spring;
D O I
10.1109/ICMA.2007.4303976
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
A new method called finite mode transform method (FMTM) on the eigenfrequency computation of an Euler-Bernoulli beam carrying arbitrary number of concentrated mass and spring is introduced and compared with other existing methods. The FMTM shows good convergence with the increase of the mode number and is a. much faster algorithm compared with the analytical method and Galerkin method when the total number of concentrated mass and spring is small. A discussion on the advantages and disadvantages of the microsensor eigenfrequency computation formulation by these three methods (FMTM, analytical and Galerkin) is also presented.
引用
收藏
页码:2657 / 2661
页数:5
相关论文
共 24 条
[1]  
AMBARAO CL, 1963, J APPL MECH, V31, P550
[2]  
BAKER WE, 1964, J APPL MECH, V31, P335, DOI DOI 10.1115/1.3629609
[3]  
CHANG TC, 1969, J ENG MECH, V195, P1027
[4]   Nanoelectromechanical systems [J].
Craighead, HG .
SCIENCE, 2000, 290 (5496) :1532-1535
[5]   Design, fabrication and vapor characterization of a microfabricated flexural plate resonator sensor and application to integrated sensor arrays [J].
Cunningham, B ;
Weinberg, M ;
Pepper, J ;
Clapp, C ;
Bousquet, R ;
Hugh, B ;
Kant, R ;
Daly, C ;
Hauser, E .
SENSORS AND ACTUATORS B-CHEMICAL, 2001, 73 (2-3) :112-123
[6]   Enhanced functionality of cantilever based mass sensors using higher modes [J].
Dohn, S ;
Sandberg, R ;
Svendsen, W ;
Boisen, A .
APPLIED PHYSICS LETTERS, 2005, 86 (23) :1-3
[7]   Nanoelectromechanical systems [J].
Ekinci, KL ;
Roukes, ML .
REVIEW OF SCIENTIFIC INSTRUMENTS, 2005, 76 (06)
[8]   Ultrasensitive nanoelectromechanical mass detection [J].
Ekinci, KL ;
Huang, XMH ;
Roukes, ML .
APPLIED PHYSICS LETTERS, 2004, 84 (22) :4469-4471
[9]   Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems [J].
Ekinci, KL ;
Yang, YT ;
Roukes, ML .
JOURNAL OF APPLIED PHYSICS, 2004, 95 (05) :2682-2689
[10]  
Hess M.S., 1964, J. Appl. Mech, V31, P556