Electrical and optical study of ITO films on glass and polymer substrates prepared by DC magnetron sputtering type negative metal ion beam deposition

被引：58

作者：

You, Y. Z. ^{[1
]}

Kim, Ys. ^{[1
]}

Choi, D. H. ^{[1
]}

Jang, H. S. ^{[1
]}

Lee, J. H. ^{[1
]}

Kim, Daeil ^{[1
]}

机构：

[1] Univ Ulsan, Sch Mat Sci & Engn, Ulsan 680749, South Korea

来源：

MATERIALS CHEMISTRY AND PHYSICS | 2008年 / 107卷 / 2-3期

关键词：

indium tin oxide; ion beam; resistivity; XRD; AFM; PES;

D O I：

10.1016/j.matchemphys.2007.08.015

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Transparent, conducting indium tin oxide (ITO) films were deposited without intentional substrate heating on glass and polyethersulfone (PES) substrates by a magnetron sputter type negative metal ion source (MSNIS). The effect of substrate type on optical transmittance, electrical resistivity, surface morphology and roughness of the ITO film was analyzed. ITO/glass substrates show a higher optical transmittance (89%) and lower resistivity (4 x 10(-4) Omega cm) than ITO/PES (78%, 6 x 10(-4) Omega cm). X-ray diffraction (XRD) spectra indicate polycrystalline ITO films deposited on glass and amorphous ITO films on PES. Atomic force microscopy (AFM) images also indicate that ITO/glass has a lower surface roughness than ITO/PES. The values of figure of merit (T-10/R-sh) for ITO/glass (phi(TC) = 7.7 x 10(-3) Omega(-1)) are higher than ITO/PES (phi(TC) = 1.3 x 10(-3) Omega(-1)), indicating that ITO/glass achieved the best performance in this study. (c) 2007 Elsevier B.V. All rights reserved.

引用

页码：444 / 448

页数：5

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