CMOS-MEMS resonant RF mixer-filters

被引：36

作者：

Chen, F ^{[1
]}

Brotz, J ^{[1
]}

Arslan, U ^{[1
]}

Lo, CC ^{[1
]}

Mukherjee, T ^{[1
]}

Fedder, GK ^{[1
]}

机构：

[1] Carnegie Mellon Univ, Dept Elect & Comp Engn, Pittsburgh, PA 15213 USA

来源：

MEMS 2005 MIAMI: TECHNICAL DIGEST | 2005年

关键词：

resonator; RF mixer-filter; CMOS-MEMS;

D O I：

10.1109/MEMSYS.2005.1453858

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An integrated CMOS-MEMS micromechanical resonant mixer-filter with potential for application in a single-chip receiver is introduced. Air and anchor damping characterization show quality factor greater than 1500. Downconversion and filtering of signal frequencies as high as 3.2 GHz is achieved. This is the highest signal frequency applied so far to MEMS mixer-filters. Analytical calculations match well with the experimental measurements and are used to show that 0 dB mixer conversion loss is achievable. Co-simulation of the MEMS mixer with readout electronics identifies potential solutions to eliminate mixing feedthrough.

引用

页码：24 / 27

页数：4

共 12 条

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