Visible electroluminescence from silicon nanocrystals embedded in amorphous silicon nitride matrix

被引：92
作者：
Chen, LY
Chen, WH
Hong, FCN
机构：
[1] Natl Cheng Kung Univ, Dept Chem Engn, Tainan 70101, Taiwan
[2] Natl Cheng Kung Univ, Ctr Micro Nano Technol, Tainan 70101, Taiwan
来源：
APPLIED PHYSICS LETTERS | 2005年 / 86卷 / 19期
关键词：
D O I：
10.1063/1.1925311
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Visible electroluminescence from silicon nanocrystals (Si-NCs) embedded in amorphous silicon nitride (a-SiNx) films has been observed. The Si-NC/a-SiNx films were deposited by evaporating silicon from electron gun into the inductively coupled plasma of nitrogen. The density of Si-NCs in the a-SiNx matrix was around 10(12) cm(-2). Strong room temperature photoluminescence was observed in 2.8 and 3.0 eV, different from literature values. The electroluminescence (EL) devices were fabricated with Si-NCs/a-SiNx film as the active layer using the Al or Ca/Ag cathode and the indium tin oxide anode. Through tunneling, the electrons and holes were respectively injected from the cathode and anode into Si-NCs and confined within Si-NCs for light emission by the high band gap a-SiNx matrix. For the device with Ca/Ag cathode, the turn-on voltage was as low as 10 V and the EL efficiency was about 1.6 x 10(-1) Cd/A. The EL spectra consisted of two broad peaks centered around 2.5 and 2.8 eV. Our results demonstrate that Si-NCs/a-SiNx nanocomposite films have potentials to be fabricated into electroluminescence devices using the low work function cathode. (c) 2005 American Institute of Physics.
引用
收藏
页码：1 / 3
页数：3
相关论文
共 50 条
[21]   First synthesis of silicon nanocrystals in amorphous silicon nitride from a preceramic polymer [J].
Biesuz, M. ;
Bettotti, P. ;
Signorini, S. ;
Bortolotti, M. ;
Campostrini, R. ;
Bahri, M. ;
Ersen, O. ;
Speranza, G. ;
Lale, A. ;
Bernard, S. ;
Soraru, G. D. .
NANOTECHNOLOGY, 2019, 30 (25)
[22]   Effect of the reflection by the silicon aggregates on the photoluminescence from silicon nitride film embedded silicon nanocrystals [J].
Hafsi, Nadjet ;
Bouridah, Hachemi ;
Boutaoui, Noureddine .
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2017, 68 :334-338
[23]   Silicon-based materials for optoelectronics:: Visible photoluminescence and electroluminescence from amorphous silicon [J].
Dian, J ;
Valenta, J ;
Poruba, A ;
Horváth, P ;
Luterová, K ;
Fojtík, P ;
Pelant, I .
PHOTONICS, DEVICES,AND SYSTEMS, 2000, 4016 :472-477
[24]   Stress transition from compressive to tensile for silicon nanocrystals embedded in amorphous silica matrix [J].
Zatryb, G. ;
Misiewicz, J. ;
Wilson, P. R. J. ;
Wojcik, J. ;
Mascher, P. ;
Podhorodecki, A. .
THIN SOLID FILMS, 2014, 571 :18-22
[25]   Optical characterization and density of states determination of silicon nanocrystals embedded in amorphous silicon based matrix [J].
van Sebille, M. ;
Vasudevan, R. A. ;
Lancee, R. J. ;
van Swaaij, R. A. C. M. M. ;
Zeman, M. .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2015, 48 (32)
[26]   Trions in silicon nanocrystals in an amorphous hydrogenated silicon matrix [J].
Belolipetskiy, A. V. ;
Gusev, O. B. ;
Dmitriev, A. P. ;
Terukov, E. I. ;
Yassievich, I. N. .
SEMICONDUCTORS, 2014, 48 (02) :235-238
[27]   Trions in silicon nanocrystals in an amorphous hydrogenated silicon matrix [J].
A. V. Belolipetskiy ;
O. B. Gusev ;
A. P. Dmitriev ;
E. I. Terukov ;
I. N. Yassievich .
Semiconductors, 2014, 48 :235-238
[28]   Electroluminescence from Si nanocrystals by annealing amorphous silicon carbide films [J].
Rui, Yunjun ;
Shuxin Li ;
Song, Chao ;
Sun, Hongcheng ;
Lin, Tao ;
Liu, Yu ;
Xu, Jun ;
Li, Wei ;
Chen, Kunji .
SEVENTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS, 2011, 7995
[29]   SONOS memories with embedded silicon nanocrystals in nitride [J].
Liu, Mei-Chun ;
Chiang, Tsung-Yu ;
Kuo, Po-Yi ;
Chou, Ming-Hong ;
Wu, Yi-Hong ;
You, Hsin-Chiang ;
Cheng, Ching-Hwa ;
Liu, Sheng-Hsien ;
Yang, Wen-Luh ;
Lei, Tan-Fu ;
Chao, Tien-Sheng .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2008, 23 (07)
[30]   High efficiency silicon visible light emitter using silicon nanocrystals in silicon nitride matrix and transparent doping layer [J].
Sung, GY ;
Park, NM ;
Kim, TY ;
Kim, KH ;
Cho, KS ;
Shin, JH .
2005 2nd IEEE International Conference on Group IV Photonics, 2005, :51-53
12345