A centrally-clamped parallel-beam bistable MEMS mechanism

被引：62

作者：

Qiu, J ^{[1
]}

Lang, JH ^{[1
]}

Slocum, AH ^{[1
]}

机构：

[1] MIT, Cambridge, MA 02139 USA

来源：

14TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2001年

关键词：

D O I：

10.1109/MEMSYS.2001.906551

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a monolithic mechanically-bistable mechanism that does not rely on residual stress for its bistability. The bistable mechanism comprises two centrally-clamped parallel beams that have a curved shape but no residual stress after fabrication. Modal analysis and FEA simulation of the beams are used to predict and design the bistable behavior, and they agree well. Micro-scale mechanisms are fabricated by DRIE and their test results agree well with the theoretical and numerical predictions.

引用

页码：353 / 356

页数：4

共 11 条

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CHEN KS, MRS SPRING M S

[2]

CRANDALL S, INTRO MECH SOLIDS, P583

[3] All-silicon bistable micromechanical fiber switch based on advanced bulk micromachining [J].