A Flow-Through Microfluidic Relative Permittivity Sensor

被引：4

作者：

Zeng, Yaxiang ^{[1
]}

Sanders, Remco ^{[1
]}

Wiegerink, Remco ^{[1
]}

Lotters, Joost ^{[1
,2
]}

机构：

[1] Univ Twente, Integrated Devices & Syst Grp, POB 217, NL-7500 AE Enschede, Netherlands

[2] Bronkhorst High Tech BV, Nijverheidsstr lA, NL-7261 AK Ruurlo, Netherlands

来源：

MICROMACHINES | 2020年 / 11卷 / 03期

关键词：

capacitance sensor; interdigitated electrodes; relative permittivity sensor;

D O I：

10.3390/mi11030325

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

In this paper, we present the design, simulation, fabrication and characterization of a microfluidic relative permittivity sensor in which the fluid flows through an interdigitated electrode structure. Sensor fabrication is based on an silicon on insulator (SOI) wafer where the fluidic inlet and outlet are etched through the handle layer and the interdigitated electrodes are made in the device layer. An impedance analyzer was used to measure the impedance between the interdigitated electrodes for various non-conducting fluids with a relative permittivity ranging from 1 to 41. The sensor shows good linearity over this range of relative permittivity and can be integrated with other microfluidic sensors in a multiparameter chip.

引用

页数：11

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