Synthesis of SiC nanorods by chemical vapor deposition

In this paper we describe a method for the synthesis of SiC-nanorods on different substrates by using chemical vapor deposition. Similar to the growth of single- and multi-walled carbon nanotubes, SiC-nanorods grow about a catalytically controlled process. Suitable catalysts are Fe, Ni, or Co. For the deposition we used a ferrocene [Fe(C5H5)(2)], a hydrocarbon (C6H6 or C6H14), and as the precursor for silicon, the liquid SiCl4. HRTEM-investigations with EEL- and EDX-spectroscopy show the well-developed SiC-nanorods. The yield of SiC is dependent on the gas phase composition, especially the concentration of ferrocene and the hydrogen excess. During on Si-substrates branched nanorods are always formed with the catalyst particle on the tip; on WC/Co hardmetals an interaction can be observed between the catalyst Co and the SiCl4 (Co-silicides).