ZnO thin films for VOC sensing applications

被引：109
作者：
Al-Hardan, N. H. [1 ]
Abdullah, M. J. [1 ]
Aziz, A. Abdul [1 ]
Ahmad, H. [1 ]
Low, L. Y. [1 ]
机构：
[1] Univ Sains Malaysia, Sch Phys, George Town 11800, Malaysia
来源：
VACUUM | 2010年 / 85卷 / 01期
关键词：
Zinc oxide; Gas sensors; RF sputtering; Nanostructure; VOLATILE ORGANIC-COMPOUNDS; GAS SENSOR; TEMPERATURE; HYDROGEN; AL;
D O I：
10.1016/j.vacuum.2010.04.009
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
ZnO thin films were prepared by reactive RF sputtering on thermally oxidized Si for gas sensing applications. Three VOC vapors were chosen to investigate the response behavior of the prepared ZnO. Acetone, isopropanol and ethanol were tested, and the sensitivity of the sensor toward acetone was the highest (S similar to 100) for 500 ppm acetone at 400 degrees C. The largest sensitivity was achieved at 400 degrees C for all the above vapors. The sensor shows a stable, reversible and repeatable behavior in the acetone concentration ranging from 15 up to 1000 ppm. The mechanism of the sensing was explained according to the ion-osorption model. (C) 2010 Elsevier Ltd. All rights reserved.
引用
收藏
页码：101 / 106
页数：6
相关论文
共 31 条
  • [1] The gas response enhancement from ZnO film for H2 gas detection
    Al-Hardan, N.
    Abdullah, M. J.
    Aziz, A. Abdul
    [J]. APPLIED SURFACE SCIENCE, 2009, 255 (17) : 7794 - 7797
  • [2] Sensing mechanism of hydrogen gas sensor based on RF-sputtered ZnO thin films
    Al-Hardan, N. H.
    Abdullah, M. J.
    Aziz, A. Abdul
    [J]. INTERNATIONAL JOURNAL OF HYDROGEN ENERGY, 2010, 35 (09) : 4428 - 4434
  • [3] Aswal DK., 2006, SCI TECHNOLOGY CHEMI
  • [4] Nanopillar ZnO gas sensor for hydrogen and ethanol
    Bie, Li-Jian
    Yan, Xiao-Na
    Yin, Jing
    Duan, Yue-Qin
    Yuan, Zhi-Hao
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2007, 126 (02) : 604 - 608
  • [5] An investigation of the relationship between air emissions of volatile organic compounds and the incidence of cancer in Indiana counties
    Boeglin, ML
    Wessels, D
    Henshel, D
    [J]. ENVIRONMENTAL RESEARCH, 2006, 100 (02) : 242 - 254
  • [6] Characteristics and sensing properties of dipped La0.8Sr0.2Co1-xNixO3-δ film for CO gas sensors
    Chiu, CM
    Chang, YH
    [J]. THIN SOLID FILMS, 1999, 342 (1-2) : 15 - 19
  • [7] Zinc oxide nanobelts by RF sputtering for ethanol sensor
    Choopun, Supab
    Hongsith, Niyom
    Mangkorntong, Pongsri
    Mangkorntong, Nikorn
    [J]. PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 2007, 39 (01) : 53 - 56
  • [8] Linear temperature microhotplate gas sensor array for automotive cabin air quality monitoring
    Francioso, L.
    Forleo, A.
    Taurino, A. M.
    Siciliano, R.
    Lorenzelli, L.
    Guarnieri, V.
    Adami, A.
    Agnusdei, G.
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2008, 134 (02): : 660 - 665
  • [9] PECVD prepared SnO2 thin films for ethanol sensors
    Hellegouarc'h, F
    Arefi-Khonsari, F
    Planade, R
    Amouroux, J
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2001, 73 (01) : 27 - 34
  • [10] Fabrication of gas sensing devices with ZnO nanostructure by the low-temperature oxidation of zinc particles
    Hsueh, Ting-Jen
    Hsu, Cheng-Liang
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2008, 131 (02) : 572 - 576
1234