ZnO thin films for VOC sensing applications

被引：108
|
作者：
Al-Hardan, N. H. [1 ]
Abdullah, M. J. [1 ]
Aziz, A. Abdul [1 ]
Ahmad, H. [1 ]
Low, L. Y. [1 ]
机构：
[1] Univ Sains Malaysia, Sch Phys, George Town 11800, Malaysia
来源：
VACUUM | 2010年 / 85卷 / 01期
关键词：
Zinc oxide; Gas sensors; RF sputtering; Nanostructure; VOLATILE ORGANIC-COMPOUNDS; GAS SENSOR; TEMPERATURE; HYDROGEN; AL;
D O I：
10.1016/j.vacuum.2010.04.009
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
ZnO thin films were prepared by reactive RF sputtering on thermally oxidized Si for gas sensing applications. Three VOC vapors were chosen to investigate the response behavior of the prepared ZnO. Acetone, isopropanol and ethanol were tested, and the sensitivity of the sensor toward acetone was the highest (S similar to 100) for 500 ppm acetone at 400 degrees C. The largest sensitivity was achieved at 400 degrees C for all the above vapors. The sensor shows a stable, reversible and repeatable behavior in the acetone concentration ranging from 15 up to 1000 ppm. The mechanism of the sensing was explained according to the ion-osorption model. (C) 2010 Elsevier Ltd. All rights reserved.
引用
收藏
页码：101 / 106
页数：6
相关论文
共 50 条
  • [1] Sol gel porous ZnO thin films for gas sensing applications
    Musat, V.
    Fortunato, E.
    Fernandes, F. Braz
    Silva, R. Jorge Cordetro
    JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, 2007, 9 (05): : 1395 - 1398
  • [2] Oxygen sensing with ZnO thin films
    Blauw, M. A.
    Dam, V. A. T.
    Crego-Calama, M.
    Brongersma, S. H.
    Musschoot, J.
    Detavernier, C.
    2011 IEEE SENSORS, 2011, : 1416 - +
  • [3] ZnO and Au/ZnO thin films: Room-temperature chemoresistive properties for gas sensing applications
    Gaiardo, A.
    Fabbri, B.
    Giberti, A.
    Guidi, V.
    Bellutti, P.
    Malagu, C.
    Valt, M.
    Pepponi, G.
    Gherardi, S.
    Zonta, G.
    Martucci, A.
    Sturaro, M.
    Landini, N.
    SENSORS AND ACTUATORS B-CHEMICAL, 2016, 237 : 1085 - 1094
  • [4] THE FORMATION OF THIN ZNO FILMS FOR SPECIAL APPLICATIONS
    KONCZAK, S
    KRZESINSKI, A
    THIN SOLID FILMS, 1981, 85 (3-4) : 276 - 276
  • [5] ZnO thin films growth, characteristics and applications
    Du, GT
    Chang, YC
    Zhang, YT
    Ma, Y
    Yang, XT
    Zhao, BJ
    2004: 7TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUITS TECHNOLOGY, VOLS 1- 3, PROCEEDINGS, 2004, : 2361 - 2365
  • [6] Nanostructured ZnO Thin Films: Properties and Applications
    Dimova-Malinovska, Doriana
    NANOTECHNOLOGICAL BASIS FOR ADVANCED SENSORS, 2010, : 157 - 166
  • [7] High performance piezoresistive response of nanostructured ZnO/Ag thin films for pressure sensing applications
    Ferreira, Armando
    Silva, Joao Paulo
    Rodrigues, Rui
    Martin, Nicolas
    Lanceros-Mendez, Senentxu
    Vaz, Filipe
    THIN SOLID FILMS, 2019, 691
  • [8] EDTA-Decorated Nanostructured ZnO/CdS Thin Films for Oxygen Gas Sensing Applications
    L. Arunraja
    P. Thirumoorthy
    A. Karthik
    V. Rajendran
    L. Edwinpaul
    Journal of Electronic Materials, 2016, 45 : 4100 - 4107
  • [9] EDTA-Decorated Nanostructured ZnO/CdS Thin Films for Oxygen Gas Sensing Applications
    Arunraja, L.
    Thirumoorthy, P.
    Karthik, A.
    Rajendran, V.
    Edwinpaul, L.
    JOURNAL OF ELECTRONIC MATERIALS, 2016, 45 (08) : 4100 - 4107
  • [10] RF magnetron sputtered Cd doped ZnO thin films for gas-sensing applications
    Vinoth, E.
    Gowrishankar, S.
    Gopalakrishnan, N.
    MATERIALS AND MANUFACTURING PROCESSES, 2017, 32 (04) : 377 - 382
12345