Analytical Approach in the Development of RF MEMS Switches

被引：19

作者：

Lysenko, Igor E. ^{[1
]}

Tkachenko, Alexey V. ^{[1
]}

Sherova, Elena V. ^{[2
]}

Nikitin, Alexander V. ^{[1
]}

机构：

[1] Southern Fed Univ, Dept Elect Apparatuses Design, Taganrog 347929, Russia

[2] Taganrog Sci Res Inst Commun, Taganrog 347913, Russia

来源：

ELECTRONICS | 2018年 / 7卷 / 12期

关键词：

RF MEMS; switch; analytical approach; low control voltage; high switching speed; high reliability; MICROMECHANICAL RELAY; RELIABILITY; DESIGN;

D O I：

10.3390/electronics7120415

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

Currently, the technology of microelectromechanical systems is widely used in the development of high-frequency and ultrahigh-frequency devices. The most important requirements for modern and advanced devices of the ultra-high-frequency range are the reduction of weight and size characteristics, power consumption with an increase in their functionality, operating frequency and level of integration. Radio frequency microelectromechanical switches are developed using the technology of the manufacture of CMOS-integrated circuits. Integrated radio frequency control circuits require low control voltages, the high ratio of losses to the isolation in the open and closed condition, high performance and reliability. This review is devoted to the analytical approach based on the knowledge of materials, basic performance indices and mechanisms of failure, which can be used in the development of radio-frequency microelectromechanical switches.

引用

页数：23

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