Adaptive aberration compensation for three-dimensional micro-fabrication of photonic crystals in lithium niobate

被引：70

作者：

Cumming, Benjamin P. ^{[1
,2
]}

Jesacher, Alexander ^{[3
]}

Booth, Martin J. ^{[4
]}

Wilson, Tony ^{[4
]}

Gu, Min ^{[1
,2
]}

机构：

[1] Swinburne Univ Technol, Fac Engn & Ind Sci, Ctr Microphoton, Hawthorn, Vic 3122, Australia

[2] Swinburne Univ Technol, Fac Engn & Ind Sci, CUDOS, Hawthorn, Vic 3122, Australia

[3] Innsbruck Med Univ, Div Biomed Phys, A-6020 Innsbruck, Austria

[4] Univ Oxford, Dept Engn Sci, Oxford OX1 3PJ, England

来源：

OPTICS EXPRESS | 2011年 / 19卷 / 10期

基金：

英国工程与自然科学研究理事会; 澳大利亚研究理事会;

关键词：

LASER; GLASSES; FOCUS;

D O I：

10.1364/OE.19.009419

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present the use of a liquid crystal spatial light modulator to correct for the refractive-index mismatch induced spherical aberration in a high refractive-index lithium niobate crystal when a low repetition rate amplified laser is used for the direct fabrication of three-dimensional micro-structures. By correcting the aberration based on experimentally determined values, we show that the size of written structures decreases dramatically, which allows the fabrication of high quality micro-structures such as three-dimensional photonic crystals. We demonstrate that, through the use of adaptive optics, the fabrication depth and the stopgap strength in the corresponding photonic crystals are increased by a factor of two to three. (C) 2011 Optical Society of America

引用

页码：9419 / 9425

页数：7

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