Investigating electrical properties of controllable graphene nanoribbon field effect transistors

被引:3
|
作者
Wang, Jianping [1 ]
Wang, Quan [1 ,2 ,3 ]
机构
[1] Jiangsu Univ, Sch Mech Engn, Zhenjiang Key Lab Adv Sensing Mat & Devices, Zhenjiang 212013, Jiangsu, Peoples R China
[2] Chinese Acad Sci, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China
[3] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China
基金
中国国家自然科学基金;
关键词
Graphene nanoribbon; Focused ion beam; Field effect transistor; Mobility; On/off current ratio; HIGH-QUALITY; SPECTROSCOPY;
D O I
10.1016/j.physb.2020.412022
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
It is always an important issue to open the energy gap for graphene while retaining its high carrier mobility. Narrowing down large-area graphene into graphene nanoribbons (GNRs) is one of the ways to open the energy gap to achieve field-effect transistors (FET) suitable for logic circuits. But it has been a problem to obtain GNRs with controllable width and specific boundary structure. In this work, we proposed a simple high-precision preparation method for GNRs. In the process, GNRs with a width of 200 nm and smooth edges were prepared by a focused ion beam (FIB) etching process. Graphene nanoribbon field-effect transistors (GNR-FET) were fabricated by electron beam lithography (EBL). In this device, due to the proximity of the edge of the Hethorn during the FIB etching process, the carbon atom structure of the GNRs edge was changed, resulting in variations in electron transport properties. The electrical performance test demonstrated that the on/off current ratio of the GNR-FET device was up to 103 at room temperature. The structural defects of the GNRs caused the device carrier mobility down to 371.6 cm(2)V(-1)s(-1). The structural defects in the GNRs edge introduced by FIB can improve the on/off current ratio of the device and hence enhanced its electrical regulation performance. Our work provides a simple method of making controllable GNRs to fabricate field effect transistors.
引用
收藏
页数:6
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