X-ray multilayer characterization using reflectivity beamline at Indus-1

被引：0

作者：

Modi, Mohammed H. ^{[1
]}

Prasad, T. T. ^{[1
]}

Nayak, M. ^{[1
]}

Pothana, N. ^{[1
]}

Jaiswal, A. ^{[1
]}

Rai, S. K. ^{[1
]}

Lodha, G. S. ^{[1
]}

机构：

[1] RRCAT, Xray Opt Sect, Indore 452013, India

来源：

SRI 2009: THE 10TH INTERNATIONAL CONFERENCE ON SYNCHROTRON RADIATION INSTRUMENTATION | 2010年 / 1234卷

关键词：

Multilayer; X-ray Reflectivity; Inter diffusion; Soft X-ray; Synchrotron Radiation; MO/SI MULTILAYERS; MIRRORS; SURFACE;

D O I：

10.1063/1.3463310

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Poor knowledge of optical constants of various materials in the soft x-ray region requires to test the soft x-ray optical devices at actual wavelengths. For such purposes a soft x-ray/vacuum ultraviolet reflectivity beamline has been setup on Indus-1 synchrotron. X-ray multilayer structures are also being developed at RRCAT. Silicon based different multilayer optics fabricated in house for 100-200 angstrom wavelength region show a very high reflectivity performance. A new multilayer combination comprised of NbC/Si is proposed for achieving good thermal stability and high reflectivity in the Si L-edge region. A high reflectivity of 63% in near normal incidence region is obtained with a sputter deposited Mo/Si combination. Results and prospects of growing NbC/Si multilayer are presented.

引用

收藏

页码：716 / 719

页数：4

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