Translation Matching Method for Obtaining the Refractive Index of Chalcogenide Films Based on the Transmission Spectra

被引：2

作者：

Pan, Lei ^{[1
]}

Song, Baoan ^{[1
]}

Xiao, Chuanfu ^{[1
]}

Mao, Ning ^{[1
]}

Lin, Changgui ^{[2
]}

Zhang, Peiqing ^{[2
]}

Shen, Xiang ^{[2
]}

Dai, Shixun ^{[2
]}

机构：

[1] Ningbo Univ, Fac Elect Engn & Comp Sci, Ningbo 315211, Peoples R China

[2] Ningbo Univ, Res Inst Adv Technol, Ningbo 315211, Peoples R China

来源：

IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT | 2021年 / 70卷

基金：

中国国家自然科学基金;

关键词：

Chalcogenide films; femtosecond (fs) laser irradiation; heat treatment; refractive index (RI) measurement; transmission spectra; OPTICAL-CONSTANTS; THIN-FILMS; SURFACE-ROUGHNESS; THICKNESS;

D O I：

10.1109/TIM.2021.3088483

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The translation matching method (TMM) was presented here to obtain the refractive index (RI) of chalcogenide films more accurately. It solved the problem of calculation errors of the RI of the film that resulted from using the Swanepoel method after conventional treatments such as illumination, electrical measurement, and annealing. The TMM was suitable for calculating the RI of the film by calibrating the transmission spectrum regardless of whether it had been dealt with. The accuracy of the RI calculation is about 0.1% using the method. Experimentally, the method was used to obtain the RI of three chalcogenide films: they are original homogeneous film and RI nonuniform film treated by annealing and by femtosecond laser direct writing, respectively. The results showed that the decrease in the transmittance and weakened interference effect were effectively overcome and the RI of the three kinds of films was accurately obtained by using the method. This work should provide a useful guideline for obtaining the RI of the transparent optical films.

引用

页数：7

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