Vibration-based MEMS piezoelectric energy harvesters using cantilever beams

被引：0

作者：

Bin Saadon, Salem ^{[1
,2
]}

Bin Sidek, Othman ^{[2
]}

Hamad, Osama S. ^{[1
]}

机构：

[1] Univ Sains Malaysia, Sch Elect & Elect Engn, Perai, Pulau Pinang, Malaysia

[2] Univ Sains Malaysia, Collaborat Microelect Design Excellence Ctr CEDEC, Perai, Pulau Pinang, Malaysia

来源：

OPTOELECTRONICS AND ADVANCED MATERIALS-RAPID COMMUNICATIONS | 2010年 / 4卷 / 08期

关键词：

PZT; Vibration; Cantilever beam; Energy harvesting; MEMS; BAND-PASS FILTERS; POWER GENERATOR; PERFORMANCE; FABRICATION;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The simplicity associated with the piezoelectric micro-generators makes it very attractive for MEMS applications, especially for remote systems. The use of piezoelectric materials to capitalize on the ambient vibrations surrounding a system is one method that has seen a dramatic rise in use for power harvesting. In this paper we reviewed the work carried out by researchers during the last three years. The improvements in experimental results obtained in the vibration based MEMS piezoelectric energy harvesters show very good scope for MEMS piezoelectric harvesters in the field of power MEMS in the near future.

引用

页码：1219 / 1224

页数：6

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