A low cost, high resolution interface circuit for differential capacitance transducer

被引:4
作者
Hu, HL [1 ]
Xu, TM [1 ]
Hui, S [1 ]
机构
[1] Xian Jiaotong Univ, Dept Elect Engn, Xian 710049, Peoples R China
关键词
capacitance transducers; interface circuit; lock-in detection;
D O I
10.1080/10739140500311338
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
For accurately detecting capacitance changes of the differential-capacitance transducer, which is widely used in environmental and chemical engineering, a low-cost interface circuit was developed. The circuit uses a "lock-in detection" circuit with feedback loop containing a DC amplifier and a modulator to yield such advantages over the others that it reduces the sensitivity to element parameter variations in the "lock-in detection" circuit, that it decreases the sensitivity to the disturbances within closed-loop, and that it is immune to parasitic capacitance, resistance, amplitude, and frequency of the excitation voltage source. The circuit has the capability to detect a capacitance change as small as 0.0078% of the total capacitance, up to 80 pF. A capacitance diaphragm pressure transducer and a standard pressure source (Rusca 2465 piston gauge) are connected to the interface to confirm the analysis.
引用
收藏
页码:727 / 735
页数:9
相关论文
共 7 条
[1]   HIGH-ACCURACY CIRCUITS FOR ON-CHIP CAPACITANCE RATIO TESTING OR SENSOR READOUT [J].
CAO, YM ;
TEMES, GC .
IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS II-ANALOG AND DIGITAL SIGNAL PROCESSING, 1994, 41 (09) :637-639
[2]   MEASUREMENT OF SMALL CAPACITANCE VARIATIONS [J].
MARIOLI, D ;
SARDINI, E ;
TARONI, A .
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 1991, 40 (02) :426-428
[3]   A SWITCHED-CAPACITOR CHARGE-BALANCING ANALOG-TO-DIGITAL CONVERTER AND ITS APPLICATION TO CAPACITANCE MEASUREMENT [J].
MATSUMOTO, H ;
SHIMIZU, H ;
WATANABE, K .
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 1987, 36 (04) :873-878
[4]   CAPACITANCE-TO-PHASE ANGLE CONVERSION FOR THE DETECTION OF EXTREMELY SMALL CAPACITIES [J].
WOLFFENBUTTEL, RF ;
REGTIEN, PPL .
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 1987, 36 (04) :868-872
[5]   A capacitive pressure sensor interface using oversampling Delta-Sigma demodulation techniques [J].
Yamada, M ;
Watanabe, K .
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 1997, 46 (01) :3-7
[6]  
1996, Patent No. 5537109
[7]  
1992, Patent No. 5099386