Grazing-incidence small angle x-ray scattering studies of nanoscale polymer gratings

被引：6

作者：

Doxastakis, Manolis ^{[1
]}

Suh, Hyo Seon ^{[1
,2
]}

Chen, Xuanxuan ^{[2
]}

Delgadillo, Paulina A. Rincon ^{[2
,4
,5
]}

Wan, Lingshu ^{[2
]}

Williamson, Lance ^{[2
]}

Jiang, Zhang ^{[6
]}

Strzalka, Joseph ^{[6
]}

Wang, Jin ^{[6
]}

Chen, Wei ^{[1
]}

Ferrier, Nicola ^{[3
]}

Ramirez-Hernandez, Abelardo ^{[1
]}

de Pablo, Juan J. ^{[1
,2
]}

Gronheid, Roel ^{[4
]}

Nealey, Paul ^{[1
,2
]}

机构：

[1] Argonne Natl Lab, Div Mat Sci, Argonne, IL 60439 USA

[2] Univ Chicago, Inst Mol Engn, Chicago, IL 60637 USA

[3] Argonne Natl Lab, Div Math & Comp Sci, Argonne, IL 60439 USA

[4] IMEC, B-3001 Leuven, Belgium

[5] Katholieke Univ Leuven, Dept Elect Engn, B-3001 Leuven, Belgium

[6] Argonne Natl Lab, Adv Photon Source, Argonne, IL 60439 USA

来源：

METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXIX | 2015年 / 9424卷

关键词：

GISAXS; Grazing-incidence x-ray scattering; Scattering simulation; Directed-Self Assembly; LiNe flow; Grating;

D O I：

10.1117/12.2085824

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Grazing-Incidence Small Angle X-ray Scattering (GISAXS) offers the ability to probe large sample areas, providing three-dimensional structural information at high detail in a thin film geometry. In this study we exploit the application of GISAXS to structures formed at one step of the LiNe (Liu-Nealey) flow using chemical patterns for directed self-assembly of block copolyilier lilnis. Experiments coltducted at the Argoinie National Laboratory provided scattering patterns probing film characteristics at both parallel and normal directions to the surface. We demonstrate the application of new computational methods to construct models based on scattering measured. SUCh analysis allows for extraction of structural characteristics at unprecedented dett-til.

引用

页数：7

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