Diffraction Correction of Locking Fabry-Perot Interferometer in Calculable Capacitor at NIM

被引：0

作者：

Wang, Jianbo ^{[1
]}

Qian, Jin ^{[1
]}

Liu, Zhongyou ^{[1
]}

Yin, Cong ^{[1
]}

Lu, Zuliang ^{[1
]}

Huang, Lu ^{[1
]}

Yang, Yan ^{[1
]}

机构：

[1] Natl Inst Metrol, Beijing 100013, Peoples R China

来源：

2018 CONFERENCE ON PRECISION ELECTROMAGNETIC MEASUREMENTS (CPEM 2018) | 2018年

基金：

国家重点研发计划;

关键词：

Calculable capacitor; diffraction correction; displacement measurement; Fabry-Perot interferometer;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes a diffraction correction of the displacement measurement in calculable capacitor. A mathematical model of the locking interferometer based on Gaussian beam propagation is set up. The phase difference between the two cavities of interest is analyzed numerically. The simulation result demonstrates that the minimum value of the displacement correction can be obtained by actively detecting the laser light at a distance of 560 mm from output mirror.

引用

页数：2