Three-dimensional fabrication and characterisation of core-shell nano-columns using electron beam patterning of Ge-doped SiO2

被引：11
|
作者：
Gontard, Lionel C. [1 ]
Jinschek, Joerg R. [2 ]
Ou, Haiyan [3 ]
Verbeeck, Jo [4 ]
Dunin-Borkowski, Rafal E. [5 ,6 ]
机构：
[1] CSIC, Inst Ciencia Mat Sevilla, Seville 41092, Spain
[2] FEI Europe, NL-5600 KA Eindhoven, Netherlands
[3] Tech Univ Denmark, Dept Photon, DK-2800 Lyngby, Denmark
[4] Univ Antwerp, EMAT, B-2020 Antwerp, Belgium
[5] Forschungszentrum Julich, Ernst Ruska Ctr Microscopy & Spect Elect, D-52425 Julich, Germany
[6] Forschungszentrum Julich, Peter Grunberg Inst, D-52425 Julich, Germany
来源：
APPLIED PHYSICS LETTERS | 2012年 / 100卷 / 26期
关键词：
INDUCED DAMAGE; NANOPARTICLES; GLASSES; SHAPES;
D O I：
10.1063/1.4731765
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A focused electron beam in a scanning transmission electron microscope (STEM) is used to create arrays of core-shell structures in a specimen of amorphous SiO2 doped with Ge. The same electron microscope is then used to measure the changes that occurred in the specimen in three dimensions using electron tomography. The results show that transformations in insulators that have been subjected to intense irradiation using charged particles can be studied directly in three dimensions. The fabricated structures include core-shell nano-columns, sputtered regions, voids, and clusters. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4731765]
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页数：4
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