Temperature dependence of the current conduction mechanisms in ferroelectric Pb(Zr0.53,Ti0.47)O3 thin films

被引:51
作者
Juan, TPC [1 ]
Chen, SM
Lee, JYM
机构
[1] Tsing Hua Univ, Dept Elect Engn, Hsinchu, Taiwan
[2] Tsing Hua Univ, Inst Elect Engn, Hsinchu, Taiwan
关键词
D O I
10.1063/1.1646441
中图分类号
O59 [应用物理学];
学科分类号
摘要
The temperature dependence of the current conduction mechanisms in Au/Pb(Zr-0.53,Ti-0.47)O-3/Pt (Au/PZT/Pt) metal-insulator-metal thin-film capacitors was investigated. The dominant current conduction mechanism from 300 to 375 K is space-charge-limited current (SCLC) due to holes and changes to Schottky emission in the temperature range of 400 to 500 K above the electric field of 0.2 MV/cm. It is observed that the transition voltage (V-tr) of SCLC conduction decreases with increasing temperature. Shallow hole trap levels vary from 0.3 to 0.19 eV above the valence-band edge as the temperature varies from 300 to 375 K. The trap-filled-limited voltage (V-TFL) increases with increasing temperature. The deep trap level extracted from V-TFL is positioned at 0.39 eV above the valence-band edge. The Au/PZT barrier height extracted from Schottky emission is 0.85 eV. An energy band diagram of the Au/PZT/Pt system is proposed to explain the current-voltage characteristics. (C) 2004 American Institute of Physics.
引用
收藏
页码:3120 / 3125
页数:6
相关论文
共 28 条
[1]  
BERNACKI SE, 1992, MATER RES SOC S P, V243, P135
[2]   FERROELECTRIC SCHOTTKY DIODE [J].
BLOM, PWM ;
WOLF, RM ;
CILLESSEN, JFM ;
KRIJN, MPCM .
PHYSICAL REVIEW LETTERS, 1994, 73 (15) :2107-2110
[3]   Leakage current characteristics of lead-zirconate-titanate thin film capacitors for memory device applications [J].
Chen, HM ;
Tsaur, SW ;
Lee, JYM .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1998, 37 (07) :4056-4060
[4]   DEEP-LEVEL DOMINATED CURRENT VOLTAGE CHARACTERISTICS OF BURIED IMPLANTED OXIDE SILICON-ON-INSULATOR [J].
DAS, K ;
PALMOUR, JW ;
POSTHILL, JB ;
HUMPHREYS, TP ;
OSULLIVANFRENCH, J ;
BYRD, NJ ;
LU, D ;
WORTMAN, JJ ;
PARIKH, NR .
IEEE ELECTRON DEVICE LETTERS, 1989, 10 (03) :135-137
[5]   PHOTOINDUCED HYSTERESIS CHANGES AND OPTICAL STORAGE IN (PB,LA)(ZR,TI)O3 THIN-FILMS AND CERAMICS [J].
DIMOS, D ;
WARREN, WL ;
SINCLAIR, MB ;
TUTTLE, BA ;
SCHWARTZ, RW .
JOURNAL OF APPLIED PHYSICS, 1994, 76 (07) :4305-4315
[6]   CORRELATION OF METAL-SEMICONDUCTOR BARRIER HEIGHT AND METAL WORK FUNCTION - EFFECTS OF SURFACE STATES [J].
GEPPERT, DV ;
COWLEY, AM ;
DORE, BV .
JOURNAL OF APPLIED PHYSICS, 1966, 37 (06) :2458-&
[7]  
GROVE AS, 1967, PHYS TECHNOL S, P346
[8]   DIRECT-CURRENT CONDUCTION PROPERTIES OF SPUTTERED PT/(BA0.7SR0.3)TIO3/PT THIN-FILMS CAPACITORS [J].
HSU, WY ;
LUTTMER, JD ;
TSU, R ;
SUMMERFELT, S ;
BEDEKAR, M ;
TOKUMOTO, T ;
NULMAN, J .
APPLIED PHYSICS LETTERS, 1995, 66 (22) :2975-2977
[9]   Thickness-dependent electrical properties of Pb(Zr, Ti)O3 thin film capacitors for memory device applications [J].
Kundu, TK ;
Lee, JYM .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2000, 147 (01) :326-329
[10]  
Lampert M.A.M., 1970, CURRENT CONDUCTION S