THICKNESS UNIFORMITY INSPECTION WITH COMPARISON OFF-AXIS DIGITAL HOLOGRAPHY

被引：0
作者：
Jin, Jinan [1 ]
Jeon, Sungbin [1 ]
Cho, Janghyun [2 ]
Park, No-Cheol [1 ]
机构：
[1] Yonsei Univ, Dept Mech Engn, 50 Yonsei Ro, Seoul, South Korea
[2] Yonsei Univ, Ctr Informat Storage Device, 50 Yonsei Ro, Seoul, South Korea
来源：
PROCEEDINGS OF THE ASME CONFERENCE ON INFORMATION STORAGE AND PROCESSING SYSTEMS, 2016 | 2016年
关键词：
MICROSCOPY;
D O I：
暂无
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
This research proposes a comparison off-axis digital holographic technology for thickness uniformity inspection of transparent products. Compared to existing technologies, the comparison off-axis digital holographic method has advantages such as high depth resolution and large field of view. Also, the proposed method can measure the thickness differences between standard product and the ones produced by one shot imaging with tilt correction. Comparative analysis is used to demonstrate the effectiveness.
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页数：3
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