Theoretical and experimental study of highly textured GaAs on silicon using a graphene buffer layer

被引:24
作者
Alaskar, Yazeed [1 ,2 ]
Arafin, Shamsul [1 ]
Lin, Qiyin [3 ]
Wickramaratne, Darshana [4 ]
McKay, Jeff [5 ]
Norman, Andrew G. [6 ]
Zhang, Zhi [7 ]
Yao, Luchi [8 ]
Ding, Feng [9 ]
Zou, Jin
Goorsky, Mark S. [5 ]
Lake, Roger K. [4 ]
Zurbuchen, Mark A.
Wang, Kang L. [1 ]
机构
[1] Univ Calif Los Angeles, Dept Elect Engn, Device Res Lab, Los Angeles, CA 90095 USA
[2] King Abdulaziz City Sci & Technol, Natl Nanotechnol Res Ctr, Riyadh 11442, Saudi Arabia
[3] Univ Calif Irvine, Lab Electron & Xray Instrumentat, Irvine, CA 92697 USA
[4] Univ Calif Riverside, Dept Elect & Comp Engn, Lab Terahertz & Terascale Elect, Riverside, CA 92521 USA
[5] Univ Calif Los Angeles, Dept Mat Sci & Engn, Los Angeles, CA 90095 USA
[6] Natl Renewable Energy Lab, Denver, CO 80401 USA
[7] Univ Queensland, Mat Engn, Brisbane, Qld 4072, Australia
[8] Chinese Acad Sci, Shanghai Inst Tech Phys, Shanghai 200083, Peoples R China
[9] Hong Kong Polytech Univ, Inst Text & Clothing, Hong Kong, Hong Kong, Peoples R China
基金
美国国家科学基金会;
关键词
Thin film; Molecular beam epitaxy; Semiconducting gallium arsenide; Semiconducting III-V materials; Semiconducting silicon; DER-WAALS EPITAXY; NANOWIRE GROWTH; SI; DISLOCATIONS;
D O I
10.1016/j.jcrysgro.2015.02.003
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
A novel heteroepitaxial growth technique, quasi-van der Waals epitaxy, promises the ability to deposit three-dimensional GaAs materials on silicon using two-dimensional graphene as a buffer layer by overcoming the lattice and thermal expansion mismatch. In this study, density functional theory (DFT) simulations were performed to understand the interactions at the GaAs/graphene hetero-interface as well as the growth orientations of GaAs on graphene. To develop a better understanding of the molecular beam epitaxy-grown GaAs films on graphene, samples were characterized by x-ray diffraction (theta-2 theta scan, omega-scan, grazing incidence XRD and pole figure measurement) and transmission electron microscopy. The realizations of smooth GaAs films with a strong (111) oriented fiber-texture on graphene/silicon using this deposition technique are a milestone towards an eventual demonstration of the epitaxial growth of GaAs on silicon, which is necessary for integrated photonics application. (C) 2015 Elsevier B.V. All rights reserved.
引用
收藏
页码:268 / 273
页数:6
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