RETRACTED: Characterization of MgxZn1-xO films grown by remote-plasma-enhanced metalorganic chemical vapor-deposition using bis-ethylcyclopentadienyl magnesium (Retracted article. See vol. 49, art. no. 129201, 2010)

被引：15
|
作者：
Nakamura, A
Yamamoto, K
Ishihara, J
Aoki, T
Temmyo, J
机构：
[1] Shizuoka Univ, Grad Sch Elect Sci & Technol, Hamamatsu, Shizuoka 4328011, Japan
[2] Shizuoka Univ, Elect Res Inst, Hamamatsu, Shizuoka 4328011, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2005年 / 44卷 / 10期
关键词：
remote-plasma-enhanced MOCVD; MgxZn1-xO; diethyl zinc (DEZn); bis-ethylcyclopentadienyl magnesium (EtCp2Mg); Stokes' shift;
D O I：
10.1143/JJAP.44.7267
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
MgxZn1-xO films were successfully grown on a-plane sapphire (11 (2) over bar0) substrates by remote-plasma-enhanced metalorganic chemical vapor-deposition (RPE-MOCVD) using diethyl zinc (DEZn) and bis-ethylcyclopentadienyl magnesium (EtCp2Mg). By increasing magnesium content in the films, the crystal structure was shifted through a mixed state from wurtzite to rock salt. The optical band-gap of the films at nearly 3.28 eV was shifted to 3.69 eV by alloying with magnesium depending on the alloy composition. Both optical absorption edges and emission peaks of MgxZn1-xO films shifted to higher energy when the magnesium content at room temperature was increased, showing alloy broadening. The Stokes' shift of wurtzite MgxZn1-xO alloy films was quantitatively evaluated. The results are relevant to exciton localization.
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页码：7267 / 7270
页数：4
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