共 50 条
- [31] Fabrication of ultrathin suspended membranes from atomic layer deposition films JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2022, 40 (02):
- [33] Recent progress in fabrication of high efficient catalysts by atomic layer deposition Huagong Jinzhan/Chemical Industry and Engineering Progress, 2021, 40 (08): : 4242 - 4252
- [35] Fabrication and Characterization of Lead Sulfide Thin Films by Atomic Layer Deposition ATOMIC LAYER DEPOSITION APPLICATIONS 4, 2008, 16 (04): : 29 - 36
- [37] Fabrication of annular photonic crystals by atomic layer deposition and sacrificial etching JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2009, 27 (02): : 568 - 572
- [38] Luminescence properties of lanthanide and ytterbium lanthanide titanate thin films grown by atomic layer deposition JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2016, 34 (01):
- [40] Direct fabrication of NbS2 nanoflakes on carbon fibers by atomic layer deposition for ultrasensitive cardiac troponin I detection NANOSCALE ADVANCES, 2023, 5 (03): : 830 - 839