Development of microfabricated TiO2 channel waveguides

被引：54

作者：

Furuhashi, Masayuki ^{[1
]}

Fujiwara, Masazumi ^{[1
,2
]}

Ohshiro, Takahito ^{[1
]}

Tsutsui, Makusu ^{[1
]}

Matsubara, Kazuki ^{[1
]}

Taniguchi, Masateru ^{[1
]}

Takeuchi, Shigeki ^{[1
,2
]}

Kawai, Tomoji ^{[1
,3
]}

机构：

[1] Osaka Univ, Inst Sci & Ind Res, Osaka 5670047, Japan

[2] Hokkaido Univ, Res Inst Elect Sci, Kita Ku, Sapporo, Hokkaido 0010020, Japan

[3] Konkuk Univ, Dept Phys, Div Quantum Phases & Devices, Seoul 143701, South Korea

来源：

AIP ADVANCES | 2011年 / 1卷 / 03期

基金：

日本学术振兴会;

关键词：

SOL-GEL METHOD; THIN-FILMS; OPTICAL-PROPERTIES; TITANIUM-DIOXIDE; BEAM; DIAMETER; DEVICES;

D O I：

10.1063/1.3615716

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

An optical channel waveguide is a key solution to overcome signal propagation delay. For the benefits of miniaturization, development of microfabrication process for waveguides is demanded. TiO2 is one of the suitable candidates for the microfabricated waveguide because of the high refractive index and the transparency. In the present study, conventional microfabrication processes manufactured TiO2 channel waveguides with 1-20 mu m width on oxidized Si substrates and the propagation loss was measured. The prepared channels successfully guided light of 632.8 nm along linear and Y-branched patterns. The propagation loss for the linear waveguide was 9.7 dB/cm. Copyright 2011 Author(s). This article is distributed under a Creative Commons Attribution 3.0 Unported License. [doi:10.1063/1.3615716]

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