Design, modeling, analysis and testing of a novel piezo-actuated XY compliant mechanism for large workspace nano-positioning

In this paper, a new piezo-actuated XY parallel compliant mechanism for large workspace nano-positioning with decoupled motions is developed by incorporating a novel Z-shaped flexure hinge (ZFH)-based mechanism into the mirror-symmetrically distributed structure. The bridgetype mechanism and two-stage leverage mechanisms serve as preliminary displacement amplifiers, while further amplification with motion transfer and decoupled output motions are achieved by means of the ZFH mechanism. Based on finite element theory, a high-precision analytical model of the XY compliant mechanism is established by considering all the connecting linkages as flexible components. Through the improved differential evolution algorithm, the optimized compliant mechanism is capable of performing millimeter-scale workspace nano-positioning with decoupled motions. In addition, the input displacement unbalance, resulting from the lateral force which has potential to damage the piezoelectric actuators, is markedly lowered to a negligible value. The performance of the fabricated compliant mechanism with optimized parameters is investigated to well agree with both the analytical model and ANSYS simulation. In addition, based on the inverse kinematics derived from the model and experimental results, different elliptical vibration trajectories are accurately acquired.