Optical, electrical and structural study of metallic nano-structured thin films fabricated by oblique angle deposition

Various metallic nano-structured thin films were fabricated by oblique angle deposition. Their optical, electrical and structural properties were investigated to explore potential applications in optoelectronic field. The shape, size and density of metal films were discussed based on SEM images and their thermal characteristics. The optical reflectance, transmittance, and absorptance measurements showed unique optical properties of each metallic nano-structured films. Indeed, ellipsometry measurement and resistance measurement were performed to investigate directivity of nano-columnar films depending on polarization properties, and conductivity, respectively.