Nanomechanical humidity detection through porous alumina cantilevers

被引：7

作者：

Boytsova, Olga ^{[1
,2
]}

Klimenko, Alexey ^{[1
]}

Lebedev, Vasiliy ^{[1
]}

Lukashin, Alexey ^{[1
]}

Eliseev, Andrey ^{[1
]}

机构：

[1] Moscow MV Lomonosov State Univ, Moscow 119992, Russia

[2] Russian Acad Sci, NS Kurnakov Gen & Inorgan Chem Inst, Moscow 119991, Russia

来源：

BEILSTEIN JOURNAL OF NANOTECHNOLOGY | 2015年 / 6卷

关键词：

anodic aluminium oxide; atomic force microscopy (AFM); cantilever arrays; humidity; mechanical sensor; porous alumina;

D O I：

10.3762/bjnano.6.137

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We present here the behavior of the resonance frequency of porous anodic alumina cantilever arrays during water vapor adsorption and emphasize their possible use in the micromechanical sensing of humidity levels at least in the range of 10-22%. The sensitivity of porous anodic aluminium oxide cantilevers (Delta f/Delta m) and the humidity sensitivity equal about 56 Hz/pg and about 100 Hz/%, respectively. The approach presented here for the design of anodic alumina cantilever arrays by the combination of anodic oxidation and photolithography enables easy control over porosity, surface area, geometric and mechanical characteristics of the cantilever arrays for micromechanical sensing.

引用

页码：1332 / 1337

页数：6

共 13 条

[1] ATOMIC FORCE MICROSCOPE [J].

BINNIG, G ;

QUATE, CF ;

GERBER, C .

PHYSICAL REVIEW LETTERS, 1986, 56 (09) :930-933

[2] Cantilever-like micromechanical sensors [J].

Boisen, Anja ;

Dohn, Soren ;

Keller, Stephan Sylvest ;

Schmid, Silvan ;

Tenje, Maria .

REPORTS ON PROGRESS IN PHYSICS, 2011, 74 (03)

[3]

Brevnov DA, 2010, MOD ASP ELECTROCHEM, V48, P215, DOI 10.1007/978-1-4419-5589-0_5

[4] ADSORPTION-INDUCED SURFACE STRESS AND ITS EFFECTS ON RESONANCE FREQUENCY OF MICROCANTILEVERS [J].

CHEN, GY ;

THUNDAT, T ;

WACHTER, EA ;

WARMACK, RJ .

JOURNAL OF APPLIED PHYSICS, 1995, 77 (08) :3618-3622

[5] Microcantilevers: Sensing chemical interactions via mechanical motion [J].

Goeders, Karen M. ;

Colton, Jonathan S. ;

Bottomley, Lawrence A. .

CHEMICAL REVIEWS, 2008, 108 (02) :522-542

[6] Possibility of a femtogram mass biosensor using a self-sensing cantilever [J].

Hosaka, S ;

Chiyoma, T ;

Ikeuchi, A ;

Okano, H ;

Sone, H ;

Izumi, T .

CURRENT APPLIED PHYSICS, 2006, 6 (03) :384-388

[7] Cantilevered carbon nanotube hygrometer [J].

Kuroyanagi, Toshinori ;

Terada, Yuki ;

Takei, Kuniharu ;

Akita, Seiji ;

Arie, Takayuki .

APPLIED PHYSICS LETTERS, 2014, 104 (19)

[8] Cantilever transducers as a platform for chemical and biological sensors [J].

Lavrik, NV ;

Sepaniak, MJ ;

Datskos, PG .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2004, 75 (07) :2229-2253

[9] Nanoporous silicalite-only cantilevers as micromechanical sensors: Fabrication, resonance response and VOCs sensing performance [J].

Pellejero, I. ;

Agusti, J. ;

Urbiztondo, M. A. ;

Sese, J. ;

Pina, M. P. ;

Santamaria, J. ;

Abadal, G. .

SENSORS AND ACTUATORS B-CHEMICAL, 2012, 168 :74-82

[10] Permeability of anodic alumina membranes with branched channels [J].

Petukhov, D. I. ;

Napolskii, K. S. ;

Eliseev, A. A. .

NANOTECHNOLOGY, 2012, 23 (33)

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