Design, static modeling and simulation of a 5-DOF precise piezoelectric positioner

This paper presents the design, the static modeling and the performances simulation of a five degrees of freedom precise poistioner. Based on piezoelectric stack actuators, the positioner is able to perform high resolution x-y-z linear motions and angular motions about x and about y axes. After presenting the design, the static modeling is carried out in order to understand the functioning of the positioner. The simulation of the model is afterwards carried out to estimate the ranges of motions that it can perform. The positioner is very promising in various applications that require dexterity and high resolution displacement such as images scanning with atomic force microscopes, micromanipulation or microassembly, etc.