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Univ Franche Comte, CNRS UMR6174, FEMTO ST Inst, Dept AS2M,UBFC,ENSMM,UTBM, 24 Rue Alain Savary, F-25000 Besancon, France Univ Franche Comte, CNRS UMR6174, FEMTO ST Inst, Dept AS2M,UBFC,ENSMM,UTBM, 24 Rue Alain Savary, F-25000 Besancon, France