Toward very large format infrared detector arrays

被引:0
作者
Gunapala, S. D. [1 ]
Bandara, S. V. [1 ]
Liu, J. K. [1 ]
Mumolo, J. M. [1 ]
Hill, C. J. [1 ]
Ting, D. Z. [1 ]
Kurth, E. [1 ]
Woolaway, J. [2 ]
LeVan, P. D. [3 ]
Tidrow, M. Z. [4 ]
机构
[1] CALTECH, Jet Prop Lab, 4800 Oak Grove Dr, Pasadena, CA 91109 USA
[2] FLIR Syst Inc, Indigo Operat, Goleta, CA 93117 USA
[3] Air Force Res Lab, Kirtland AFB, NM 87117 USA
[4] Missile Def Agcy DV, Washington, DC 20301 USA
来源
DEVICE AND PROCESS TECHNOLOGIES FOR MICROELECTRONICS, MEMS, PHOTONICS AND NANOTECHNOLOGY IV | 2008年 / 6800卷
关键词
infrared detectors; maga-pixel; QWIP; dualband; two-color; infrared imaging; focal plane arrays;
D O I
10.1117/12.753485
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Mid-wavelength infrared (MWIR) and long-wavelength infrared (LWIR) 1024x 1024 pixel InGaAs/GaAs/AlGaAs based quantum well infrared photodetector (QWIP) focal planes have been demonstrated with excellent imaging performance. The MWIR QWIP detector array has demonstrated a noise equivalent differential temperature (NEAT) of 17 mK at a 95K operating temperature with f/2.5 optics at 300K background and the LWIR detector array has demonstrated a NEAT of 13 mK at a 70K operating temperature with the same optical and background conditions as the MWIR detector array after the subtraction of system noise. Both MWIR and LWIR focal planes have shown background limited performance (BLIP) at 90K and 70K operating temperatures respectively, with similar optical and background conditions. It is well known that III-V compound semiconductor materials such as GaAs, InP, etc. are easy to grow and process into devices. In addition, III-V compound semiconductors are available in large diameter wafers, up to 8-inches. Thus, III-V compound semiconductor based infrared focal plane technologies such as QWIP, InSb, and strain layer superlattices (SLS) are potential candidates for the development of large format focal planes such as 4096x4096 pixels and larger. In this paper, we will discuss the possibility of extending the infrared detector array size up to 16 megapixels.
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页数:10
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