Theoretical analysis of the evolution of composition profiles in nanoscale multilayers

被引：0

作者：

Hentschel, M ^{[1
]}

Bobeth, M

Diener, G

Pompe, W

机构：

[1] Dresden Univ Technol, Inst Mat Sci, D-01062 Dresden, Germany

[2] Dresden Univ Technol, Inst Theoret Phys, D-01062 Dresden, Germany

来源：

TRENDS AND NEW APPLICATIONS OF THIN FILMS | 1998年 / 287-2卷

关键词：

multilayer; composition evolution; phase separation; Cahn-Hilliard theory;

D O I：

10.4028/www.scientific.net/MSF.287-288.473

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The composition evolution in multilayers during annealing has been studied within the framework of the Cahn-Hilliard theory. Analytic solutions for stationary composition profiles are discussed for a special composition dependence of the flee energy. The long-time coarsening of the layer thicknesses was calculated numerically.

引用

页码：473 / 476

页数：4

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