A Charge-Plasma-Based Transistor With Induced Graded Channel for Enhanced Analog Performance

被引:49
|
作者
Shan, Chan [2 ]
Wang, Ying [1 ]
Bao, Meng-Tian [2 ]
机构
[1] Hangzhou Dianzi Univ, Minist Educ, Key Lab RF Circuits & Syst, Hangzhou 310, Zhejiang, Peoples R China
[2] Harbin Engn Univ, Coll Informat & Commun Engn, Harbin 150001, Peoples R China
基金
黑龙江省自然科学基金; 中国国家自然科学基金;
关键词
Analog performance; charge plasma; graded channel (GC); nanoscale MOSFET; short-channel effects (SCEs); DOUBLE-GATE MOSFETS; FINFETS; DESIGN; ARCHITECTURE; DEVICE; SOI;
D O I
10.1109/TED.2016.2549554
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, using the charge-plasma concept, we propose an effective technique to implement a graded channel (GC) nanoscale MOSFET without the need for a separate implantation. The characteristics are demonstrated and compared with conventional dopingless, junctionless, and underlap inversion-mode MOSFET. The results show that the proposed GC device exhibits reduced drain-induced barrier lowering, improved intrinsic gain (A(V)), cutoff frequency (f(T)), and maximum oscillation frequency (f(MAX)). Our approach overcomes the difficulty of creating a narrow GC doping profile and, thus, makes the GC MOSFET more attractive in carrying on with the scaling trend. The possible fabrication process flow of GC-double-gate (DG) FET is also proposed.
引用
收藏
页码:2275 / 2281
页数:7
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