Study of plasma processes during pulsed laser ablation of graphite target in nitrogen

被引：6
作者：
Bulír, J
Novotny, M
Jelínek, M
Jastrabík, L
Zelinger, Z
机构：
[1] Acad Sci Czech Republ, Inst Phys, Prague 18221 8, Czech Republic
[2] Acad Sci Czech Republ, J Heyrovsky Inst Phys Chem, Prague 18223 8, Czech Republic
来源：
SURFACE & COATINGS TECHNOLOGY | 2003年 / 174卷
关键词：
plasma processes; laser deposition; emission spectroscopy;
D O I：
10.1016/S0257-8972(03)00705-9
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Plasma processes during CNx films deposition were studied in a pulsed laser deposition system equipped with a KrF excimer laser (500 mJ, 20 ns). The laser plasma was characterized in a pressure range from 2 to 100 Pa of nitrogen gas. We report on an optical emission spectroscopy, which was used for a spatial and time resolved investigation of the plasma species. Analysis includes estimation of vibrational and rotational temperatures of the CN molecule. (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：968 / 972
页数：5
相关论文
共 9 条
[1]   Optical emission diagnostic of laser-induced plasma during CNx film deposition [J].
Aldea, E ;
Caricato, AP ;
Dinescu, G ;
Luches, A ;
Perrone, A .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1997, 36 (7B) :4686-4689
[2]  
BRATESCU MA, 2002, APPL SURF SCI, V8008, P1
[3]   Pulsed laser deposition of CNx films:: role of r.f. nitrogen plasma activation for the film structure formation [J].
Bulir, J ;
Novotny, M ;
Jelínek, M ;
Lancok, J ;
Zelinger, Z ;
Trchová, M .
DIAMOND AND RELATED MATERIALS, 2002, 11 (3-6) :1223-1226
[4]   Optical emission spectroscopy of molecular species in plasma induced by laser ablation of carbon in nitrogen [J].
Dinescu, G ;
Aldea, E ;
De Giorgi, ML ;
Luches, A ;
Perrone, A ;
Zocco, A .
APPLIED SURFACE SCIENCE, 1998, 127 :697-702
[5]   Expansion dynamics of laser ablated carbon plasma plume in helium ambient [J].
Harilal, SS .
APPLIED SURFACE SCIENCE, 2001, 172 (1-2) :103-109
[6]  
Luque J, 1999, 99009 SRI MP
[7]   Interaction of ambient nitrogen gas and laser ablated carbon plume: Formation of CN [J].
Thareja, RK ;
Dwivedi, RK ;
Ebihara, K .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2002, 192 (03) :301-310
[8]   A study of molecule formation during laser ablation of graphite in low-pressure nitrogen [J].
Vivien, C ;
Hermann, J ;
Perrone, A ;
Boulmer-Leborgne, C ;
Luches, A .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1998, 31 (10) :1263-1272
[9]   Nitride-molecule synthesis in plasma produced by reactive laser ablation assisted by RF discharge for thin-film deposition [J].
Vivien, C ;
Dinescu, M ;
Meheust, P ;
Boulmer-Leborgne, C ;
Caricato, AP ;
Perriere, J .
APPLIED SURFACE SCIENCE, 1998, 127 :668-673
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