Structure, Properties and Applications of Diamond Like Nanocomposite (SiOx Containing DLC) Films: A Review

被引：62
作者：
Meskinis, Sarunas [1 ]
Tamuleviciene, Asta [1 ]
机构：
[1] Kaunas Univ Technol, Inst Mat Sci, LT-50131 Kaunas, Lithuania
来源：
MATERIALS SCIENCE-MEDZIAGOTYRA | 2011年 / 17卷 / 04期
关键词：
SiOx containing diamond like carbon; diamond like nanocomposite films; C-H FILMS; BEAM DEPOSITED SIOX; CARBON-FILMS; TRIBOLOGICAL PROPERTIES; NANOMECHANICAL PROPERTIES; DIELECTRIC-PROPERTIES; THERMAL-CONDUCTIVITY; RAMAN-SPECTROSCOPY; OPTICAL-PROPERTIES; COATINGS;
D O I：
10.5755/j01.ms.17.4.770
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The present article reviews current situation on SiOx containing diamond like carbon (diamond like nanocomposite) films. The overview of different deposition methods and reagents used is presented; chemical composition of different diamond like nanocomposite films is described. Different models of structure of diamond like nanocomposite films are considered. Mechanical, optical, electrical properties as well as surface energy of diamond like nanocomposite films produced by different methods are reviewed and discussed. The survey of different potential and industrial applications of diamond like nanocomposite films is presented.
引用
收藏
页码：358 / 370
页数：13
相关论文
共 50 条
  • [21] Magnetic properties and corrosion resistance of Co-DLC nanocomposite films with different cobalt contents
    Li, Baiyi
    Zhang, Yiwen
    Wu, Zhong
    Qin, Zhenbo
    Ji, Huiming
    Liu, Xinjun
    Li, Bo
    Hu, Wenbin
    [J]. DIAMOND AND RELATED MATERIALS, 2021, 117
  • [22] Influences of Interfacial Carbonization on the Structure and Mechanical Properties of Multilayered Cr-Containing Diamond-Like Carbon Films
    Zhang, Jing
    Yu, Xiang
    Zhao, Xi-an
    Zhang, Lei
    [J]. JOURNAL OF PHYSICAL CHEMISTRY C, 2017, 121 (12) : 6781 - 6787
  • [23] FABRICATION AND PERFORMANCE OF DIAMOND-LIKE CARBON (DLC) FILMS DOPED WITH VARIOUS ELEMENT ON DIFFERENT SUBSTRATES: A BRIEF REVIEW
    Wu, Lin
    Lin, Naiming
    Yang, Yang
    Zeng, Qunfeng
    Nouri, Meisam
    Ma, Guanshui
    An, Kang
    [J]. SURFACE REVIEW AND LETTERS, 2025,
  • [24] DEPOSITION OF SiOx CONTAINING DLC FILMS USING DIFFERENT TRANSPORT GAS IN A CLOSED DRIFT ION BEAM SOURCE
    Tamuleviciene, Asta
    Kopustinskas, Vitoldas
    Meskinis, Sarunas
    Tamulevicius, Sigitas
    [J]. 3RD INTERNATIONAL CONFERENCE RADIATION INTERACTION WITH MATERIAL AND ITS USE IN TECHNOLOGIES 2010, 2010, : 169 - 172
  • [25] Preparation and properties of Ag/DLC nanocomposite films fabricated by unbalanced magnetron sputtering
    Wu, Yanxia
    Chen, Jianmin
    Li, Hongxuan
    Ji, Li
    Ye, Yinping
    Zhou, Huidi
    [J]. APPLIED SURFACE SCIENCE, 2013, 284 : 165 - 170
  • [26] Molecular structure of SiOx-incorporated diamond-like carbon films; evidence for phase segregation
    Randeniya, L. K.
    Bendavid, A.
    Martin, P. J.
    Amin, M. S.
    Preston, E. W.
    [J]. DIAMOND AND RELATED MATERIALS, 2009, 18 (09) : 1167 - 1173
  • [27] Atomic oxygen resistant behaviors of Mo/diamond-like carbon nanocomposite lubricating films
    Ji, Li
    Li, Hongxuan
    Zhao, Fei
    Quan, Weilong
    Chen, Jianmin
    Zhou, Huidi
    [J]. APPLIED SURFACE SCIENCE, 2009, 255 (07) : 4180 - 4184
  • [28] Influence of structure evolution on tribological properties of fluorine-containing diamond-like carbon films: From fullerene-like to amorphous structures
    Wang, Jia
    Zhang, Kan
    Zhang, Lifang
    Wang, Fuguo
    Zhang, Junyan
    Zheng, Weitao
    [J]. APPLIED SURFACE SCIENCE, 2018, 457 : 388 - 395
  • [29] Effect of nickel incorporation on microstructural and optical properties of electrodeposited diamond like carbon (DLC) thin films
    Pandey, B.
    Pal, P. P.
    Bera, S.
    Ray, S. K.
    Kar, A. K.
    [J]. APPLIED SURFACE SCIENCE, 2012, 261 : 789 - 799
  • [30] Characterisation of thermally annealed diamond like carbon (DLC) and silicon modified DLC films by Raman spectroscopy
    Ogwu, AA
    Lamberton, RW
    Morley, S
    Maguire, P
    McLaughlin, J
    [J]. PHYSICA B, 1999, 269 (3-4): : 335 - 344
12345