Comparison of Superconducting Nanowire Single-Photon Detectors Made of NbTiN and NbN Thin Films

被引：38

作者：

Yang, Xiaoyan

You, Lixing ^{[1
]}

Zhang, Lu

Lv, Chaolin

Li, Hao

Liu, Xiaoyu

Zhou, Hui

Wang, Zhen

机构：

[1] Chinese Acad Sci, Shanghai Inst Micro Syst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China

来源：

IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY | 2018年 / 28卷 / 01期

基金：

中国国家自然科学基金; 国家重点研发计划;

关键词：

NbTiN films; NbN films; superconducting nanowire single-photon detectors (SNSPD); NIOBIUM NITRIDE; EFFICIENCY;

D O I：

10.1109/TASC.2017.2776288

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We fabricated superconducting nanowire singlephoton detectors (SNSPDs) made of NbTiN and NbN thin films in the same fabrication batch. Various parameters, such as critical temperature, resistivity, switching current, and kinetic inductance, were compared between the two types of SNSPDs. These data indicate that NbTiN SNSPD surpasses NbN SNSPD in many aspects, including a shorter recovery time due to smaller kinetic inductance, a lower timing jitter due to higher switching current, and better uniformity. Based on the measurement of 28 out of 121 NbTiN SNSPDs on a 2-in Si wafer, 71% of detectors show a system detection efficiency of over 50% at a dark count rate of 100 Hz, with the maximum efficiency being 77.5%.

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页数：6

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